This course covers the device physics, underlying technology, and applications of Microflow Devices. These devices derive from the broad class of technology, called MEMS (MicroElectroMechanical Systems), or MST (MicroSystems Technology) as it is called in Europe and Asia. In a historical context, MEMS can be defined as the application of the fabrication technology developed for integrated circuit manufacture, to problems outside of IC physics, devices and technology. This application of microfabrication technology will lead to advancements in two ways: through the scaling of conventional or traditional flow products and devices, resulting in reduced size and cost, and increased performance; and, through the development of new techniques and devices unattainable at larger size scales.
Since the lead time for MEMS technology to reach the marketplace appears to be between 5 and 15 years, and given the acceleration in Microflow Device development starting around 1990, we expect to see many new products hitting the market in the next five years (through 2007). Such devices include gas distribution and control products for use in the manufacture of semiconductor integrated circuits. The course will have significant emphasis on this important aspect of Microflow Device Technology.
Course Outline and Learning Objectives:
While some familiarity with differential calculus will be helpful, a general, basic background in college physics and chemistry is all that is really required. However, the more quantitative your background, the more you will derive from the course.
In its broadest scope, the course will cover the physics and technology of Microflow Devices, according to the following schedule:
- Physics of flow (including review of thermodynamics and fluid mechanics principles)
- Quantitative description of base devices
- Quantitative description of integrated (higher-order) devices
- Process technology
Completion of this course should result in a deep appreciation of Microflow Devices at a qualitative level, including an appreciation for the constraints placed on device analysis by the assumptions which underlie models for flow. It should also initiate an ability to solve creatively quantitative problems requiring the application of such devices.
Who should take the course:
The course is intended for the following students and industry professionals:
- Students interested in integrated circuit and other microdevice process engineering
- Process engineers and process technicians involved in semiconductor and other microdevice fabrication and process development
- Equipment engineers and equipment technicians involved in semiconductor and other microdevice fabrication and equipment development
- In particular, process/equipment engineers and technicians involved in the control and distribution of gas flow for IC fabrication
- Students, scientists, and professionals interested in the science, technology, and business context of MEMS, and in Microflow Devices as a particular branch of MEMS